Publikationen
- S. Seeger, K. Ellmer, M. Weise, J. Reck, R. Mientus:
Voltage-controlled reactive magnetron sputtering of Nb-doped TiO2 films: electrical and optical properties
MRS Advances (2016)
- S. Seeger, K. Ellmer, M. Weise, D. Gogova, D. Abou-Ras, R. Mientus:
Reactive magnetron sputtering of Nb-doped TiO2 films: relation between structure, composition and electrical properties
Thin Solid Films 605, (2016), p. 44 – 52
- H. Scherg-Kurmes, S. Seeger, S. Körner, Bernd Rech, R. Schlatmann, Bernd Szyszka:
Optimization of the post-deposition annealing process of high mobility In2O3:H for photovoltaic applications
Thin Solid Films 599, (2016), p. 78 – 83
- J. Reck, S. Seeger, M. Weise, R. Mientus, J. Schulte, K. Ellmer:
Flash-lamp annealing of ZnO_layers on copper-indium-gallium-sulphide layers: A spectroscopic ellipsometry study
Thin Solid Films 571 (2014), p. 762 - 766 >
- Seeger, S. ; Ellmer, K. ; Reck, J.; Schulte, J.; Helm, P.:
Modification of the Surface of Cu(In,Ga)S2 Absorbers by Shallow Zinc-Profiles :
28th European Photovoltaic Solar Energy Conference and Exhibition, Paris (2013), p. 2463
- Brunken, S. ; Mientus, R. ; Ellmer, K.:
Metal-sulfide assisted rapid crystallisation of highly (001)-textured tungsten disulphide (WS2) films on metallic back contacts:
Phys. Status Solidi A- 1-6 (2011) p.1
- Brunken, S. ; Mientus, R. ; Ellmer, K.:
In-situ energy-dispersive X-ray diffraction of metal sulfide assisted crystallization of strongly (001) textured
photoactive tungsten disulfide thin films,
Thin Solid Films 517 (2009), p. 3148-3151 doi:10.1016/j.tsf.2008.11.118
- Brunken, S. ; Mientus, R, ; Seeger, S. ; Ellmer, K.:
The mechanism of nickel sulfide induced rapid crystallization of highly textured tungsten disulfide (WS2) thin films: An in situ real-time diffraction study;
Journal of Applied Physics 103 (2008), p. 063501/1-6 doi:10.1063/1.2875679 Open Access Version
- Ellmer, K.. ; Mientus, R.:
Carrier transport in polycrystalline transparent conductive oxides: A comparative study of zinc oxide and indium oxide
Thin Solid Films 516 (2008), p. 4620-4627 doi:10.1016/j.tsf.2007.05.084
- Ellmer, K. ; Mientus, R.:
Carrier transport in polycrystalline ITO and ZnO:Al II: The Influence of grain barriers and boundaries;
Thin Solid Films 516 (2008), p. 5829-5835
- Wolf, R. ; Wandel, K. ; Boeffel, C.: Moisture Barrier Films Deposited on PET by ICPECVD of SiNx; Plasma Processes and Polymers Vol.4 (2007) Supplement 1, 185-189.
- Weiß, V. ; Seeger, S. ; Ellmer, K. ; Mientus, R.:
Reactive magnetron sputtering of tungsten disulfide (WS2-x) films: Influence of deposition parameters on texture, microstructure, and stoichiometry;
Journal of Applied Physics 101 (2007), p. 103502/1-9 doi:10.1063/1.2716395
- Ellmer, K. ; Seeger, S. ; Mientus, R.:
Rapid crystallization of WS2 films assisted by a thin nickel layer: An in situ energy-dispersive X-ray diffraction study;
Physica Status Solidi A 203 (2006), p. 2457-2462 doi:10.1002/pssa.200622016
- Ellmer, K.; Seeger, S.; Sieber, I.; Bohne, W.; Röhrich, J.; Strub, E.; Mientus, R.: Reactive magnetron sputtering of highly (001)-textured WS2-x films: Influence of Ne+, Ar+ and Xe+ ion bombardment on the film growth; Physica Status Solidi A 203 (2006), S. 497-503
- G. Kaden, M. Mai: Determination of Surface Recombination Velocity so and Carrier Lifetime τo from IF(VG) Characteristics of Al/PECVD-SiNx/pn-GaAs Gated Diodes / Semiconductor science technology 20, 1-7, 2005
- G. Kaden, M. Mai: Determination of Monitority Carrier Lifetime τP and Surface Recombination Velocity s0 of AIIIBV p-n Junctions from the Forward Current Characteristics IF(VF) / Semiconductor science technology 20, 2005, S.1136-1142
- Mientus, R. ; Ellmer, K.: Elektrische und optische Eigenschaften reaktiv gesputterter In0,9Sn0,1Ox-Schichten (ITO); Workshop 2005 Hahn-Meitner-Institut (HMI)
- Seeger, S. ; Mientus, R. ; Ellmer, K.: Influence of the ion energy on the growth of WSx films prepared by reactive magnetron sputtering; HASYLAB annual report 2004., 2005, S. 498-498
- Seeger, S. ; Mientus, R. ; Röhrich, J. ; Strub, E. ; Bohne, W. ; Ellmer, K.: Electrical and optical properties of highly (001) textured WSx films deposited by reactive magnetron sputtering; Surfaces and coatings Technology 200 (2005), S. 218-221
- Mientus, R.; Grötschel, R.; Ellmer, K.: Optical and electronic properties of CrOxNy films, deposited by reactive DC magnetron sputtering in Ar/N2/O2(N2O) atmospheres; Surface and Coatings Technology 200 (2005), S. 341-345
- Voigt, A. ; Heinrich, M. ; Hauck, K. ; Mientus, R. ; Gruetzner, G. ; Töpper, M. ; Ehrmann, O.: A Single Layer Negative Tone Lift-Off Photo Resist for Patterning a Magnetron Sputtered Ti/Pt/Au Contact System and for Solder Bumps; Microelectron. Eng. 78-79 (2005) S. 503-508
- Weiss, V. ; Bohne, W. ; Röhrich, J. ; Strub, E. ; Bloeck, U. ; Sieber, I. ; Ellmer, K. ; Mientus, R., Porsch, F.: Reactive magnetron sputtering of molybdenum sulfide thin films: In situ synchrotron x-ray diffraction and transmission electron microscopy study ; Journal of Applied Physics, 95, 12, Juni 2004, S. 7665
- Ellmer, K.; Mientus, R.; Seeger, S.; Weiß, V.: Highly (001)-textured WS2-x films prepared by reactive radio frequency magnetron sputtering; Physica Status Solidi A 201 (2004), S. R97-R100
- Weiß, V. ; Mientus, R. ; Ellmer, K.: Texture of polycrystalline MoSx thin films magnetron sputtered from a metallic target in Ar-H2S atmospheres; In: DeHaven P.W. [u.a.] [Eds.] : Magnetic and electronic films - microstructure, texture, and application to data storage : symposia held at the MRS spring meeting, April 1 - 4, 2002, San Francisco, California, U.S.A.. Warrendale, Pa: Materials Research Society, 2002 (Materials Research Society symposium proceedings ; 721), S. 131-136
- Mientus R. ; Sieber I. ; Ellmer K.: Structure and morphology of reactively sputtered In0.9Sn0.1Ox layers; In: DeHaven P.W. [u.a.] [Eds.] : Magnetic and electronic films - microstructure, texture, and application to data storage : symposia held at the MRS spring meeting, April 1 - 4, 2002, San Francisco, California, U.S.A.. Warrendale, Pa: Materials Research Society, 2002 (Materials Research Society symposium proceedings ; 721), S. 151-156
- Wolf, R. ; Wandel, K. ; Gruska, B.: Low temperature ICPECVD of silicon nitride in SiH4 NH3 Ar discharges analysed by spectroscopic ellipsometry and etch behavior in KOH and BHF; Surface and Coatings Technology Vol. (142-144)(2001) 786-791.
- Ellmer K. ; Mientus R. ; Rossner H.: In situ investigation by energy dispersive X-ray diffraction (EDXRD) of the growth of magnetron sputtered ITO films; Surface and Coatings Technology 142-144 (2001), S. 1094-1099
- Ellmer K. ; Mientus R. ; Weiß V. ; Rossner H.: Setup for in situ X-ray diffraction studies of thin film growth by magnetron sputtering; Nuclear Instruments and Methods in Physics Research A 467-468 (2001), S. 1041-1044
- Wolf, R. ; Gruska, B. ; Wandel, K.: KOH etch rate and optical properties of ICPECVD silicon nitride; MicroMat 2000, Berlin 17.-19.April, Abstract: ISBN 3-932434-14-5, S. 424
- Wolf, R. ; Wandel, K.:Plasma Chemical Vapor Deposition of SiNx Films in SiH4-N2-He Discharges by RF and VHF frequencies; Proc. ISPC-14 Praha (1999) Vol. III, S. 1427
- Mientus, R. ;Wolf, R. ; Kloth, B. ; Protsch, M. ; Pikhtin, A.N.: A highly UV-selective Schottky-barrier photodiode based on a Ag–GaP contact: Surface and Coatings Technology 116–119 (1999) S. 711–715
- Ellmer, K. ; Mientus, R.: Calorimetric measurements with a heat flux transducer of the total power influx onto a substrate during magnetron sputtering: Surface and Coatings Technology 116–119 (1999) S. 1102–1106
- Mientus, R. ; Ellmer, K. : Reactive DC magnetron sputtering of elemental targets in Ar/N2 mixtures: relation between the discharge characteristics and the heat of formation of the corresponding nitrides; Surface and Coatings Technology 116–119 (1999) S. 1093–1101
- Mientus, R. ; Ellmer, K. : Structural, electrical and optical properties of Sn02_x:F-layers deposited by DC-reactive magnetron-sputtering from a metallic target in Ar-02/CF4 mixtures; Surface and Coatings Technology 98 ( 1998) 1267-1271
- Ellmer, K. ; Kudella, F. ; Mientus, R. ;Schieck, R. ; Fiechter, S.: Influence of discharge parameters on the layer properties of reactive magnetron sputtered ZnO:Al films; Thin Solid Films 247 (1994) 15-23
- Ellmer, K. ; Kudella, F. ; Mientus, R. ;Schieck, R. ; Fiechter, S.: Reactive magnetron sputtering of Al doped ZnO films: dependence of optical, electrical, compositional and structural properties on deposition conditions; Applied Surface Science 70/71 (1993) 707-711