Measuring Mechanical Properties:

Measuring surface profiles with BRUKER Dektak XT:

Determining surface profiles and film thicknesses with a stylus profilometer by means of step height measurements 10 nm ≤ 1 µm
  • max. scan length range 55 mm (with stitching 200 mm )
  • Stylus force: 0.03 mg – 15 mg
  • 3D mapping
  • surface roughness verification
  • 2D stress analysis, deflection measurements

Dynamic micro hardness tests with SHIMADZU DUH-200:
  • Triangular pyramid indenter (tipangle 115°)
  • Test forces from 0.098 mN to 1960 mN
  • Indentation depth in a measuring range from 0 to 10 µm with minimum measuring increment of 0.001 µm
  • min. film thickness 1 µm

Scanning scratch tests with SHIMADZU SST-101:
  • thick films: µm - range (film adhesion to the substrate)
  • thin films: 0.01 µm - 0.1 µm - range (scratching)

Scanning scratch test demonstrates
the improvement of adhesion
of Pt (100nm) by Cr (5nm) on glass
scratch test
3 dimensional mapped by Dektak
(TiOx:Nb auf Glas)