Measuring Electrical Properties

  • U/I-Characteristic measurements in the range of 1 µV – 100 V;
    1 pA – 100 mA using 4 point probes method in order to determine
    sheet and specific contact resistance, also on micro structured
    contacts in linear and Van-der-Pauw-Geometry
  • CV-Measurements in the range of fF to nF
EP6 - Süss MicroTec


Four freely movable contact arms
in order to measure all kinds of
structure shapes